About SemiTrac

Test, Characterization and Analytical Services

Our technical expertise focuses on a broad range of critical subsystems found in semiconductor, MEMS and solar equipment components, process chambers, critical modules and subsystems, pumping systems and vacuum, gas and fluid delivery systems. Unique to our service offering, SemiTrac can accurately characterize the performance of various components by using live or process gases, process liquids and chemistries in our testing. SemiTrac is one of the few resources that can offer testing with the actual materials that are currently being introduced into the latest semiconductor, photovoltaic (PV) and MEMS OEM equipment.

SemiTrac provides our emerging technology customers with an essential set of integrated test and analytical services that can provide the data they need to verify, adjust or modify the critical attributes of their process subsystems. Our highly experienced technical team can provide real, tangible solutions to complex technology challenges, thus enabling our customers to confidently execute on the recommended solutions.

We focus on shortening qualification times, root cause failure analysis, and material compatibility verification. The result can have profound impact on the bottom line: Customers are able to achieve revenue faster with rigorously characterized, prototypes and production-ready subsystems and modules that will help advance cutting-edge tool, material and process development. We partner with a wide range of suppliers and technical experts across various platforms to provide best-in-class solutions.

About the Ohmi Laboratory for Advanced Semiconductor Manufacturing Technology

Partnership with Ohmi Laboratory at Tohoku University enables SemiTrac to test and characterize high performance processing technologies, which are essential for the realization of high-functional devices and circuits. By controlling the all process parameters precisely, eliminating unstable fluctuations and clarifying the phenomena, the lab is pursuing studies for the realization of "Scientific semiconductor manufacturing technology." Lab studies include low-energy ion bombardment processing technology, and deposition of high quality thin films. The lab also studies high performance processing equipment (e.g., dual-frequency rf excitation plasma processing equipment) and support technologies such as ultra clean gas delivery technology and advanced wafer cleaning technology.

U.C. Berkeley

SEMITRAC partnership with the UC Berkeley Lab enables test, characterization as well as research and development activities related to critical components used in most semiconductor manufacturing tools.

Among the laboratory's major features are a lithography center, which includes three step-and-repeat reduction cameras, two contact aligners, and a mask-making facility with an optical pattern generator; thin-film systems; 6" silicon VLSI wafer processing areas equipped with LPCVD and atmospheric furnaces, process-specific plasma etchers, wet processing stations, and various types of metrology equipment for in-line testing and specialized analytical diagnostics; a planarization laboratory with chemical-mechanical polish and interlayer dielectric deposition; and a satellite thin-film lab housing a 5-chamber high-vacuum cluster tool for dc-magnetron sputtering of metal-based thin-films. The facility supports a 0.35 μ CMOS baseline process.

About BICMOS Foundry

BiCMOS Foundry located in Santa Clara, California specializes in providing customized Semiconductor services as a pure foundry partner to a worldwide customer bases in the solar energy and semiconductor markets for 4", 5", 6" and 8" processed wafers. Access to BICMOS provides SemiTrac with a wide range of technologies: 0.13u to 10u capabilities, wafer processing on 4" to 8" substrates, analog and digital product development, wafer services such as nitride, oxide, metal sputtering, lithography in various product areas including semiconductors, solar and MEMS, and live gas and liquid testing capabilities.

More About Sowmya Krishnan

In her 13 years with UCT, Dr. Krishnan made significant business and technical contributions and helped position the company for a successful acquisition by Francisco Partners in 2000 and a successful IPO in 2004. In her role as Chief Technology Officer of a public company, she was responsible for the overall technology direction as well as due diligence related to mergers and acquisitions; she was a key player in the successful acquisition and integration of Sieger Engineering ($100M revenue) by UCT.

Dr. Krishnan also served as a director of Ultra Clean Technology Systems and Services Inc., the parent company of Ultra Clean Technology, and was a member on the board of UCT subsidiary, UCT-Shanghai. She also serves on the board of RITSnet Inc. a IT company providing remote network management solutions. She has served as symposium chair for various conferences sessions at Semicon West, Semicon Southwest, ISTC and conducted tutorials for CleanRooms West. She has been an invited speaker at NorthWestern University and served as an invited guest editor for special editions of Solid State Technology and CleanRooms. She also served on the editorial advisory board for CleanRooms Magazine for over 5 years. She has chaired SEMI standards task forces and and led the effort to set industry standards related to critical subsystems. She holds two U.S. patents, and has authored over 25 technical papers and editorials.